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Kugadziriswa Kwakagadzirwa kweAl2O3 Ceramic Wafer Chuck
Zvigadzirwa nekupisa kunotonhora uye kunopiswa nekupisa kwakanyanya, zvobva zvagadzirwa nemachina chaiwo uye zvakapetwa, zvikamu zveceramic zvinogona kusangana nechero zvinodiwa zvemidziyo yesemiconductor ine hunhu hwayo hwekudzivirira kupera, kuramba ngura, kuwedzera kupisa kushoma, uye kuputira. Ceramics inogona kushanda mumhando dzakasiyana dzemidziyo yekugadzira semiconductor ine mamiriro ekupisa kwakanyanya, vacuum kana corrosive gas kwenguva yakareba.
Yakagadzirwa nehupfu hwealumina hwakachena kwazvo, hwakagadziriswa nekudzvanywa kwe isostatic inotonhora, kupisa kwakanyanya uye kupedzisa nemazvo, inogona kusvika pakukwanisa kwayo kusvika ±0.001 mm, kupedzisa pamusoro peRa 0.1, kuramba kupisa kusvika 1600℃.
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ST.CERA Yakagadzirirwa Semiconductor Equipment Ceramic Plate
Zvigadzirwa nekupisa kunotonhora uye kunopiswa nekupisa kwakanyanya, zvobva zvagadzirwa nemachina chaiwo uye zvakapetwa, zvikamu zveceramic zvinogona kusangana nechero zvinodiwa zvemidziyo yesemiconductor ine hunhu hwayo hwekudzivirira kupera, kuramba ngura, kuwedzera kupisa kushoma, uye kuputira. Ceramics inogona kushanda mumhando dzakasiyana dzemidziyo yekugadzira semiconductor ine mamiriro ekupisa kwakanyanya, vacuum kana corrosive gas kwenguva yakareba.
Yakagadzirwa nehupfu hwealumina hwakachena kwazvo, hwakagadziriswa nekudzvanywa kwe isostatic inotonhora, kupisa kwakanyanya uye kupedzisa nemazvo, inogona kusvika pakukwanisa kwayo kusvika ±0.001 mm, kupedzisa pamusoro peRa 0.1, kuramba kupisa kusvika 1600℃.
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12-Inch Alumina Vacuum Chuck ye300mm Wafer Processing
Chigadziko chevacuum cleaner cheSt.Cera chine 12-inch chakagadzirwa nemazvo kubva pa99.8% high-purity alumina (Al₂O₃) kuti chishandiswe pakubata wafer ye300mm. Chigadziko chine nzvimbo yakatsetseka (groove width 0.5–1.0 mm, pitch 2–3 mm) kuti chive nechokwadi chekuti vacuum cleaner inopararira zvakaenzana mu300mm dhayamita yese. Kusatsetseka kunochengetwa mukati me5 μm, zvichiita kuti wafer isapinda panguva yekucheka, kukuya, uye kuongorora. Simba guru rekutenderera (361 MPa) uye kuomarara (16 GPa) zvinovimbisa kugadzikana kwenguva refu kunyangwe pasi pevacuum cycles dzinodzokororwa.
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Zvikamu zveCeramic zveSemiconductor Probe Equipment
Zvigadzirwa nekupisa kunotonhora uye kunopiswa nekupisa kwakanyanya, zvobva zvagadzirwa nemachina chaiwo uye zvakapetwa, zvikamu zveceramic zvinogona kusangana nechero zvinodiwa zvemidziyo yesemiconductor ine hunhu hwayo hwekudzivirira kupera, kuramba ngura, kuwedzera kupisa kushoma, uye kuputira. Ceramics inogona kushanda mumhando dzakasiyana dzemidziyo yekugadzira semiconductor ine mamiriro ekupisa kwakanyanya, vacuum kana corrosive gas kwenguva yakareba.
Yakagadzirwa nehupfu hwealumina hwakachena kwazvo, hwakagadziriswa nekudzvanywa kwe isostatic inotonhora, kupisa kwakanyanya uye kupedzisa nemazvo, inogona kusvika pakukwanisa kwayo kusvika ±0.001 mm, kupedzisa pamusoro peRa 0.1, kuramba kupisa kusvika 1600℃.
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Ceramic Plate Semiconductor Equipment Carrier
Zvigadzirwa nekupisa kunotonhora uye kunopiswa nekupisa kwakanyanya, zvobva zvagadzirwa nemachina chaiwo uye zvakapetwa, zvikamu zveceramic zvinogona kusangana nechero zvinodiwa zvemidziyo yesemiconductor ine hunhu hwayo hwekudzivirira kupera, kuramba ngura, kuwedzera kupisa kushoma, uye kuputira. Ceramics inogona kushanda mumhando dzakasiyana dzemidziyo yekugadzira semiconductor ine mamiriro ekupisa kwakanyanya, vacuum kana corrosive gas kwenguva yakareba.
Yakagadzirwa nehupfu hwealumina hwakachena kwazvo, hwakagadziriswa nekudzvanywa kwe isostatic inotonhora, kupisa kwakanyanya uye kupedzisa nemazvo, inogona kusvika pakukwanisa kwayo kusvika ±0.001 mm, kupedzisa pamusoro peRa 0.1, kuramba kupisa kusvika 1600℃.
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Zvishandiso zveSemiconductor Ceramic Spare Parts
Zvigadzirwa nekupisa kunotonhora uye kunopiswa nekupisa kwakanyanya, zvobva zvagadzirwa nemachina chaiwo uye zvakapetwa, zvikamu zveceramic zvinogona kusangana nechero zvinodiwa zvemidziyo yesemiconductor ine hunhu hwayo hwekudzivirira kupera, kuramba ngura, kuwedzera kupisa kushoma, uye kuputira. Ceramics inogona kushanda mumhando dzakasiyana dzemidziyo yekugadzira semiconductor ine mamiriro ekupisa kwakanyanya, vacuum kana corrosive gas kwenguva yakareba.
Yakagadzirwa nehupfu hwealumina hwakachena kwazvo, hwakagadziriswa nekudzvanywa kwe isostatic inotonhora, kupisa kwakanyanya uye kupedzisa nemazvo, inogona kusvika pakukwanisa kwayo kusvika ±0.001 mm, kupedzisa pamusoro peRa 0.1, kuramba kupisa kusvika 1600℃.
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Mhete yeSeal Alumina Ceramic Yakachena Kwazvo Yekuisirwa Kwemukamuri Yekupisa Kwakakwirira
Mhete yeSt.Cera's ceramic seal yakagadzirwa senzira yekuchinja maO-rings epolymer munzvimbo dzakanyanya uko elastomers dzinoora. Yakagadzirwa kubva ku99.8% high-purity alumina (Al₂O₃), iyi mhete yakasimba inoshandiswa mukushandiswa kwe static sealing - inowanzo batanidzwa ne soft metal kana graphite gasket - kupa vacuum yakavimbika kana gasi rekudzivirira patembiricha inosvika 800°C uye munzvimbo dzine plasma kana makemikari akasimba. Chinhu ichi hachibudisi mweya, simba rekumanikidza rakawanda (simba re flexural 361 MPa), uye kusagadzikana kwemakemikari (kunodzivirira ma halogen, acids, uye alkalis kunze kweHF). Nzvimbo dzekuvhara dzakanyatsorongeka (flatness ≤5 μm, surface roughness Ra ≤0.2 μm) dzinoita kuti pave nekusangana kwakasimba kwesimbi kana ceramic components.
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Mhete yeAlumina Chamber Focus Ring yePlasma Etch & CVD Systems
Mhete yeSt.Cera's chamber focus chinhu chakakosha chinoshandiswa mumidziyo yeplasma etch, CVD, uye PVD semiconductor. Yakagadzirwa kubva ku99.8% high-purity alumina (Al₂O₃), mhete iyi inotenderedza mupendero wewafer kuti ivhare plasma uye iwedzere kugoverwa kweion angular, nokudaro ichivandudza kufanana kwe etch pamusoro pewafer. Chinhu ichi chinopa resistance yeplasma inoshamisa, simba re dielectric rakawanda (15×10⁶ V/m), uye kugadzikana kwekupisa kusvika ku1600°C, zvichiita kuti ive yakavimbika kwenguva refu munzvimbo dzeplasma dzine fluorine- kana chlorine. Precision-ground ID/OD uye flatness (≤10 μm) zvinogonesa nzvimbo chaiyo yewafer edge, kuderedza zvikanganiso zvemupendero uye kugadzirwa kwezvikamu.
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Mhete yeAlumina Ceramic Yakachena Kwazvo yeCVD / PVD Process Chambers
Mhete yeSt.Cera yakagadzirwa zvakananga kuti ishandiswe mumakamuri ekugadzirisa eCVD (Chemical Vapor Deposition) uye PVD (Physical Vapor Deposition). Yakagadzirwa kubva ku99.8% high-purity alumina (Al₂O₃), mhete iyi inoshanda sechikamu chekamuri, ring yekutarisa, kana chikamu che process kit chekuvhara plasma nekudzivirira madziro ekamuri kubva mukukukurwa. Chinhu ichi chinopa resistance yakanaka yeplasma, simba re dielectric rakawanda (15×10⁶ V/m), uye kugadzikana kwekupisa kusvika 1600°C, zvichiita kuti ive nehupenyu hurefu munzvimbo dzeplasma dzine fluorine. Kushivirira kwakaringana (±0.05 mm paID/OD) uye flatness (≤10 μm) zvinogonesa kugadzika kwewafer edge nguva dzose, kuvandudza kufanana kwekuisa uye kuderedza kugadzirwa kwezvikamu.
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Porous Ceramic Vacuum Chuck yeWarped Wafer Handling
Chigadziko cheSt.Cera chine maburi chakagadzirwa nealumina ine maburi akaenzana e30–45% uye maburi ane maburi anokura kubva pa10 kusvika 100 μm. Kusiyana nemaburi ekare ane maburi, pamusoro pemaburi pane maburi pane wafer yese, zvichibata zvakanaka mawafer akakombama, akatetepa, kana asina kuputsika. Chigadziko ichi chine maburi chinodzivirirawo maburi ekumashure.
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Alumina-Based Porous Ceramic Vacuum Chuck yekubata Wafer yakatetepa
Chigadziko cheSt.Cera chine maburi chakagadzirwa nealumina chakagadzirwa ne99.6% Al₂O₃ ine maburi akavhurika anodzora e30–45% uye saizi yemaburi akafanana inotangira pa10 kusvika 50 μm. Kusiyana nemaburi ane maburi, nzvimbo ine maburi inopa vacuum yakapararira kuseri kwewafer yese, ichibvisa kunyorwa kwemucheto uye ichibvumira kubata zvinyoro nyoro mawafer akatetepa (≤100 μm) kana akakombama. Chigadziko ichi chinopa simba rekuchinjika ≥250 MPa uye kugadzikana kwekupisa kusvika 400°C mumhepo.
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Purati Yekugovera Gasi reAlumina yeCVD/PVD Showerhead
Purati yekugovera gasi yeSt.Cera (showerhead) yakagadzirwa nemazvo kubva mu 99.8% alumina ceramic. Ine maburi madiki (diameter 0.3–1.5 mm) ayo anovimbisa kuti gasi rinoyerera zvakaenzana pamusoro pewafer panguva yeCVD, PVD, kana ALD. Simba guru re dielectric plate (>15×10⁶ V/m) uye resistance yeplasma zvinoita kuti ive yakakosha pakuiswa kwe semiconductor thin-film.
