Mhete yeAlumina Ceramic Yakachena Kwazvo yeCVD / PVD Process Chambers
Mhete yeSt.Cera yakagadzirwa zvakananga kuti ishandiswe mumakamuri ekugadzirisa eCVD (Chemical Vapor Deposition) uye PVD (Physical Vapor Deposition). Yakagadzirwa kubva ku99.8% high-purity alumina (Al₂O₃), mhete iyi inoshanda sechikamu chekamuri, ring yekutarisa, kana chikamu che process kit chekuvhara plasma nekudzivirira madziro ekamuri kubva mukukukurwa. Chinhu ichi chinopa resistance yakanaka yeplasma, simba re dielectric rakawanda (15×10⁶ V/m), uye kugadzikana kwekupisa kusvika 1600°C, zvichiita kuti ive nehupenyu hurefu munzvimbo dzeplasma dzine fluorine. Kushivirira kwakaringana (±0.05 mm paID/OD) uye flatness (≤10 μm) zvinogonesa kugadzika kwewafer edge nguva dzose, kuvandudza kufanana kwekuisa uye kuderedza kugadzirwa kwezvikamu.
Magadzirirwo (akavakirwa pa99.8% Al₂O₃):
| Pfuma | Kukosha |
| Zvinhu | 99.8% Alumina (Nyanga dzenzou) |
| Kuwanda kwevanhu | 3.93 g/cm³ |
| Kunyudzwa kweMvura | 0% |
| Simba reKuchinjika | 361 MPa |
| Kusimba Kwekutyoka | 3–4 MPa·m¹/² |
| Kuomarara kwaVickers | 16 GPa |
| Modulus yeYoung | 380 GPa |
| Kufambisa kwekupisa | 32 W/m·k |
| Kuwedzera kwekupisa (25–1000°C) | 7.2×10⁻⁶/℃ |
| Simba reDielectric | 15×10⁶ V/m |
| Kuramba Kwakananga | >10¹⁴ Ω·cm |
| Kupisa Kunoshanda Kwakanyanya | 1600°C |
Mashandisirwo:
- · Mhete dzeCVD chamber focus uye mhete dzemucheto
- · Mhete dzePVD dzekamuri uye mhete dzeclamp
- · Machira ekuisa makamuri nemhete dzekuvhara
- · Mhete dzekuvharira plasma mumasisitimu e dielectric etch
Maitiro Ekugadzira:
Kudzvanya kweIsostatic → green machining → sintering pa1600°C → CNC ID/OD grinding → surface lapping → ultrasonic cleaning → 100% CMM inspection. Ultra-smooth surface finish (Ra ≤0.4 μm) inoderedza particle adhesion.
Kudzora Hunhu:
- · Kutarisa 100% divi (ID, OD, ukobvu, kutsetseka)
- · Kuongorora madhayi anopinda mukati meganda kuti uone kana paine maburi madiki pamusoro
- · Kuedzwa kwesimba reDielectric paASTM D149
- · Hapana kusviba kana maburi anooneka pasi pemaikorosikopu makumi maviri nembiri
Zvakanakira kupfuura Mhete dzeSimbi kana dzeQuartz:
- · Nguva refu yehupenyu kupfuura mhete dzearuminiyamu dziri muplasma yefluorine ine 5–10×
- · Hapana kusvibiswa kwesimbi mumafirimu matete
- · Kuramba kweplasma kwakanyanya kupfuura quartz (hapana makomba ekukukurwa kwevhu)
- · Inochengetedza insulation yemagetsi >10¹⁴ Ω·cm kunyangwe mushure mekushandiswa kwenguva refu
Zvimwe Zvinhu — Silicon Nitride (Si₃N₄):
Kune zvishandiso zvinoda kusimba kwakanyanya kwekupwanyika (6.2 MPa·m¹/²) uye kuramba kupisa kwakanyanya (expansion coefficient 3.2×10⁻⁶/℃), Si₃N₄ rings dziripo. Zvisinei, alumina inodhura zvishoma kune akawanda maCVD/PVD applications. Ndapota taurai zvamunoda pakutenga zvinhu.
Kugadzirisa:
- · Maburi anoburitswa nepakati, mapurofayiri ane masitepisi, kana maburi anosungirirwa pamadziro ekuisa
- · Nzvimbo yakaputirwa neY₂O₃ kuti irambe yakasimba muplasma (zvichida)
- · Kunyora neLaser nhamba yechikamu / kodhi yenzvimbo
Cherechedza:Ruzivo rwuri pamusoro apa runonyatsotevera tafura yeAl₂O₃ yakapihwa. Kune maSi₃N₄ rings, tarisa kune datasheet rakasiyana reSi₃N₄ rakapihwa.
