12-Inch Alumina Vacuum Chuck ye300mm Wafer Processing
Chigadziko chevacuum cleaner cheSt.Cera chine 12-inch chakagadzirwa nemazvo kubva pa99.8% high-purity alumina (Al₂O₃) kuti chishandiswe pakubata wafer ye300mm. Chigadziko chine nzvimbo yakatsetseka (groove width 0.5–1.0 mm, pitch 2–3 mm) kuti chive nechokwadi chekuti vacuum cleaner inopararira zvakaenzana mu300mm dhayamita yese. Kusatsetseka kunochengetwa mukati me5 μm, zvichiita kuti wafer isapinda panguva yekucheka, kukuya, uye kuongorora. Simba guru rekutenderera (361 MPa) uye kuomarara (16 GPa) zvinovimbisa kugadzikana kwenguva refu kunyangwe pasi pevacuum cycles dzinodzokororwa.
Magadzirirwo (zvichibva pa99.8% Al₂O₃):
| Pfuma | Kukosha |
| Dhayamita | 300 mm (12 inches) |
| Zvinhu | 99.8% Alumina (Nyanga dzenzou) |
| Kuwanda kwevanhu | 3.93 g/cm³ |
| Simba reKuchinjika | 361 MPa |
| Kuomarara kwaVickers | 16 GPa |
| Kureba (kupfuura 300mm) | ≤5 μm |
| Upamhi hweGroove | 0.5–1.0 mm |
| Tembiricha Yekushanda Yakanyanya | 800°C |
| Simba reDielectric | 15×10⁶ V/m |
Mashandisirwo:
300mm kuchekerera nekunyora wafer
Kukuya kwewafer kuseri (rutsigiro rwewafer rutete)
Kuongorora uye kuongorora maziso
Kusunga/kubvisa mabhondi kwenguva pfupi
Kugadzira:
CNC yakakuyiwa uye yakakweshwa kusvika yati sandara, yakasungirirwa nemavhiri edhaimani, yakacheneswa ne ultrasonic, uye yakarongedzwa muClass 100 cleanroom. Chuck yega yega inoongororwa 100% kuti haina kuti sandara (laser interferometer) uye kudzika kwe groove (profilometer).
Zvakanakira:
Kugadzirwa kwezvikamu zvishoma (≤0.05 zvikamu/cm²)
Inoshaikwa nemakemikari kuzvinhu zvinonyungudutsa uye acids
Nzvimbo isina njodzi yeESD (resistivity >10¹³ Ω·cm)
Mapatani emaburi evacuum akagadzirwa nemaoko uye maburi ekumashure anowanikwa.
