Alumina-Based Porous Ceramic Vacuum Chuck yekubata Wafer yakatetepa
Chigadziko cheSt.Cera chine maburi chakagadzirwa nealumina chakagadzirwa ne99.6% Al₂O₃ ine maburi akavhurika anodzora e30–45% uye saizi yemaburi akafanana inotangira pa10 kusvika 50 μm. Kusiyana nemaburi ane maburi, nzvimbo ine maburi inopa vacuum yakapararira kuseri kwewafer yese, ichibvisa kunyorwa kwemucheto uye ichibvumira kubata zvinyoro nyoro mawafer akatetepa (≤100 μm) kana akakombama. Chigadziko ichi chinopa simba rekuchinjika ≥250 MPa uye kugadzikana kwekupisa kusvika 400°C mumhepo.
Magadzirirwo(zvakavakirwa pa99.6% Al₂O₃):
| Pfuma | Kukosha |
| Zvinhu | 99.6% Alumina (Chena) |
| Kuboorwa kwemvura | 30–45% (inogadziriswa) |
| Saizi yepakati pemaburi | 10–50 μm |
| Simba reKuchinjika | ≥250 MPa |
| Kuwanda kwevanhu | 3.88 g/cm³ |
| Kureba (kupfuura 200mm) | ≤5 μm |
| Tembiricha Yekushanda Yakanyanya | 400°C (mhepo) |
| Kupedzisa Kwepamusoro | Yakamoneredzwa (Ra ≤0.8 μm) |
Mashandisirwo:
- · Chigayo chakatetepa (≤50 μm) chekukuya nekumashure
- · Chigadziko chewafer chakakombama chekucheka
- · Kutorwa kwediyi imwe chete
- · Kubata girazi repasi
Kugadzira:
Upfu hwakasanganiswa ne pore formers → isostatic pressing → sintering pa 1600°C → lapping kusvika paukobvu hwekupedzisira. Chuck yega yega inoongororwa kuti ionekwe kuti inoenderana sei ne vacuum (pressure deviation <5%) uye inoongororwa kuti ionekwe kuti inokwanisa kupararira sei (SEM).
Zvakanakira kupfuura machuck echinyakare:
- · Hapana kunyorwa kwewafer kana die shift
- · Inobata mawafer ane huremu hunosvika 500 μm
- · Nzvimbo yekuzvichenesa (maburi anodzivirira kuvharika)
- · Rutsigiro rwakafanana runobvisa kushushikana kwenzvimbo
Ckushandiswa kwemuchina:
Maumbirwo edenderedzwa kana sikweya, dhayamita 100–450 mm. Ring yekuvharira mucheto inowanikwa yekudzora vacuum yakaganhurirwa.
Kumbira sampuro yehukuru hwewafer yako chaiyo.
