Alumina Vacuum Chuck yekuchenesa nekukuya nemazvo
Chigadziko chevacuum cheSt.Cera chealumina chakagadzirwa ne99.8% cheAl₂O₃ chakachena zvikuru chine magirovhosi evacuum akagadzirwa nemazvo. Kugona kwedu kugaya nemazvo kunoita kuti chive chakatsetseka che0.003mm uye chive chakafanana che0.002mm, zvichiita kuti chive chakasimba chisina warp panguva yekucheka, kugaya kumashure, uye kuongorora. Chigadzirwa ichi chine simba rakakwira (361 MPa), kuomarara (16 GPa), uye kugadzikana kwekupisa kusvika 800°C. Chinowanikwa mumafomu akatenderera anosvika 600mm dhayamita yekunze (OD) uye maumbirwo erectangular anosvika 1500mm kureba. Magirovhosi evacuum akagadzirwa nenzira yakasarudzika (concentric, radial, kana grid patterns) kuti akwane zvinodiwa pakuita basa. Chuck yega yega inoongororwa ne laser interferometer uye inopihwa mushumo wekusimbisa kuti chive chakadzikama.
Magadzirirwo (akavakirwa pa99.8% Al₂O₃& Zvigadzirwa zveSt.Cera):
| Pfuma | Kukosha |
| Zvinhu | 99.8% Alumina (Nyanga dzenzou) |
| Kuwanda kwevanhu | 3.93 g/cm³ |
| Simba reKuchinjika | 361 MPa |
| Kuomarara kwaVickers | 16 GPa |
| Dhayamita yekunze (yakanyanya) | 600mm |
| Ukobvu (hwakanyanya) | 100mm |
| Kureba (kwakanyanya) | 1500mm |
| Kufara | 0.003mm |
| Kufanana | 0.002mm |
| Kupedzisa Kwepamusoro | Ra0.1 |
| Tembiricha Yekushanda Yakanyanya | 800°C |
Mashandisirwo:
- · Kucheka nekunyora machira ewafer (200mm/300mm uye yakakura)
- · Kukuya mawafer matete kuseri
- · Kuongorora nekuongorora maziso
- · Kubata substrate yakakura
Kunyatsogadzira:
- · Kutwasuka: 0.005mm
- · Kureba: 0.005mm
- · Kutenderera: 0.002mm
- · Kudzikamisa: 0.01mm
