Alumina Ceramic End Effector Yakachena Kwazvo yeWafer Handling Robots
St.Cera's alumina ceramic end effector yakagadzirwa nemazvo kubva pa99.8% high-purity Al₂O₃ tichishandisa michina yepamusoro ye 5-axis CNC grinding. Hunhu hwedu hwekugadzira hunosanganisira michina yekukuya nemazvo nenzvimbo dzeCNC machining, zvichiita kuti ma geometries akaomarara ave nemazvo. End effector ine profile yakatetepa (yakatetepa se1.5 mm) ine leading edge yakatetepa yekuisa wafer yakatsetseka. Zvinhu izvi zvinopa kuomarara kwakanyanya (Young's modulus 380 GPa), kuramba kupfeka zvakanaka, uye kugadzikana kwekupisa kusvika 800°C. Unit yega yega inogayiwa nemazvo kuti ive flatness ye 0.003mm, parallelism ye 0.002mm, uye surface finish ye Ra0.1, zvichiita kuti wafer ibatane zvakanaka uye ishande isina particles munzvimbo dze semiconductor FAB. Inowanikwa muhurefu kubva pa 150 mm kusvika 450 mm, ine custom tip geometries (edge grip, Bernoulli, flat) uye mounting flanges kuti ikwane maOEM robots. Sarudzo dzekupedzisa pamusoro dzinosanganisira kuputira kwakarukwa, kwakaporishwa, kana kuti ESD dissipative (10⁶–10⁹Ω/sq).
Magadzirirwo (akavakirwa pa99.8% Al₂O₃& Zvigadzirwa zveSt.Cera):
| Pfuma | Kukosha |
| Zvinhu | 99.8% Alumina (Nyanga dzenzou) |
| Kuwanda kwevanhu | 3.93 g/cm³ |
| Simba reKuchinjika | 361 MPa |
| Kuomarara kwaVickers | 16 GPa |
| Modulus yeYoung | 380 GPa |
| Kufara | 0.003mm |
| Kufanana | 0.002mm |
| Kupedzisa Kwepamusoro | Ra0.1 (yakamonerwa/yakakweshwa) |
| Tembiricha Yekushanda Yakanyanya | 800°C |
| Hurefu hwehurefu | 150–450 mm |
Mashandisirwo:
- · Kutamiswa kwewafer mumarobhoti anoputika uye anotenderera mumhepo
- · Zvishandiso zveFAB zvemawafer e200mm/300mm
- · Kubata wafer yakatetepa (nesarudzo yeESD)
Kugona Kugadzira:
Michina yedu yekukuya nemazvo uye nzvimbo dzekugadzira dzeCNC dzinogonesa kugadzirwa kwezvinhu zvakaoma zveceramic zvine:
- · Kureba kwakanyanya kwemuchina: 1500mm
- · Dhayamita yepamusoro yekunze: 600mm
- · Dhayamita shoma yemukati: 0.2mm
- · Ukobvu hwepamusoro: 100mm
Kudzora Hunhu:
Kutwasuka 0.005mm, kumira zvakanaka 0.005mm, kutenderera 0.002mm, kufanana 0.002mm, kutenderera 0.01mm kwakasimbiswa neCMM. Chigadziko chimwe nechimwe chinocheneswa ne ultrasonic uye Class 100 cleanroom inoiswa.
