SiC Vacuum Chuck ine Porous ine Metal-Backed yekubata Wafer yakakombama uye yakatetepa
Chigadziko cheSt.Cera chesimbi chinobatanidza ceramic chakagadzirwa nesimbi chinobatanidza silicon carbide (SiC) ceramic layer ine maburi nesimbi yakagadzirwa nemazvo (aluminium kana simbi isina ngura). Chigadziko cheSiC chine maburi (bhuruu-dema, maburi 35–40%, saizi yemaburi 20–30 μm, permeability 60 ml/cm²·min) chinopa kugoverwa kwakafanana, kwakapfava kwevacuum pamusoro pewafer yese, zvichibvisa kunyorwa kwemucheto uye zvichibvumira rutsigiro rusina kubatana rwemawafer matete (≤100 μm) kana akakombama. Chigadziko cheSiC chinopa kuwedzera kwekupisa kwakaderera (3.5×10⁻⁶/℃), kugadzikana kwekupisa kusvika 1000°C, uye simba reflexural riri pakati nepakati (32–35 MPa). Chigadziko chesimbi chinowedzera kuomarara kwechimiro, nyore kuisa kuburikidza nemaburi ane shinda, uye dziviriro kubva pakuputsika kwebrittle. Chigadziko ichi chakanakira kukuya, kuchekerera, uye kugadzirisa wafer ine tembiricha yepamusoro uko vacuum yakafanana uye thermal compatibility zvakakosha.
Magadzirirwo (zvichibva padata reSiC rine maburi rakaburitswa):
| Pfuma | Kukosha |
| Zvinhu zveCeramic | Silicon Carbide ine Porous (SiC ≥80%) |
| Ruvara | Bhuruu-dema |
| Kuboorwa kwemvura | 35–40% |
| Saizi yePore | 20–30 μm |
| Kuwanda kwevanhu | 2.1–2.3 g/cm³ |
| Kubvumidzwa kutenderuka | 60 ml/cm²·min |
| Simba reKuchinjika | 32–35 MPa |
| Kuwedzerwa kweThermal Coefficient (25-1000°C) | 3.5×10⁻⁶/℃ |
| Kupisa Kunoshanda Kwakanyanya | 1000°C |
| Kuramba Kwemagetsi | 10⁻¹⁰ Ω/cm (pa data rakapihwa, rinowanzo shandiswa paSiC ine maburi) |
| Zvinhu zveSimbi | Aruminiyamu 6061 kana Simbi Isina Kugadzika 304 (sarudzo) |
| Ukobvu hweSimbi | 10–30 mm (yakagadziriswa) |
Cherechedza: Simba rekuchinjika rakaderera pane dense SiC nekuda kwekuoma kwesimbi. Hunhu hwesimbi hahubvi pamatafura eceramic.
Mashandisirwo:
- · Kukuya mawafer matete kuseri (≤100 μm)
- · Chigadziko chewafer chakakombama chekucheka
- · Kupisa kwakanyanya kwewafer (kusvika 1000°C)
- · Kugadzirisa midziyo yekuchenesa ine maburi kana kuti isina kusimba
Kugadzira:
Plate yeSiC ine maburi (yakagadzirwa nemapore formers, yakanyungudutswa) → yakanamatira kusvika yati sandara ≤10 μm → chigadziko chesimbi chakagadzirwa nemapore evacuum uye zvinhu zvekuisa → epoxy bonding kana mechanical clamping → helium leak test.
Kudzora Hunhu:
- · Kukura kwemaburi uye saizi yemaburi kwakasimbiswa neSEM
- · Kuedzwa kwekubvumidzwa kwemhepo (kuyerera kwemhepo)
- · Kufara kwakayerwa ne laser interferometer
- · Mwero wekubuda kwemvura muHelium <1×10⁻⁹ Pa·m³/s
Zvakanakira kupfuura Grooved kana Dense Ceramic Chucks:
- · Hapana kunyorwa kwewafer - vacuum yakafanana isina maburi akaparadzana
- · Maburi ekuzvichenesa ega - kudzikira kwekuvharika
- · Inobata mawafer akakombama (anosvika 500 μm)
- · Hwaro hwesimbi hunodzivirira kuputsika kwetsandanyama uye hunoita kuti kubatana kuve nyore
Miganhu:
- · Simba rekuchinjika kwemuviri rakaderera (32–35 MPa) - dzivisa kudzvanywa kwesimba remuviri
- · Tembiricha yekushanda inogumira pa1000°C (SiC ine maburi), asi chisungo chesimbi che epoxy chinogumira pa ≤200°C kunze kwekunge chakabatidzwa nemakanika.
- · Kwete ye vacuum ine pressure yakakwira (muganho wechimiro chine maburi akawanda)
Kugadzirisa:
- · Hwaro hwesimbi: aruminiyamu (yakareruka), simbi isingatsvi (inodzivirira ngura), Invar (yakaderera kuwedzera)
- · Kubatanidza: epoxy (≤200°C) kana kuti mechanical clamp (kusvika 500°C)
- · Mhete yekuvhara mucheto yekudzora nzvimbo ye vacuum
Ndapota cherechedzai: Simba re flexural rinopihwa (32–35 MPa) rakaderera zvakanyanya pane ceramics dzakakora nekuda kwekuoma kwevhu. Bata nekungwarira kudzivirira kuchekwa kwemucheto.
