Plate yeAlumina Ceramic Yakachena Zvikuru – Yekudzivirira Kupisa & Kupisa Kwakanyanya
Purati yeSt.Cera yakagadzirwa ne99.8% alumina (Al₂O₃), ine simba re dielectric rakakwirira (15×10⁶ V/m), kugadzikana kwekupisa kusvika 1600°C, uye kuramba kupfeka zvakanaka. Mapurati akagadzirwa nemazvo kuti asvike pakutsetseka ≤5 μm pamusoro pe100 mm uye kushata kwepamusoro Ra ≤0.4 μm. Inowanikwa muukobvu hwakajairwa kubva pa1 mm kusvika 20 mm, saizi dzakagadzirwa dzinosvika 500×500 mm. Inoshandiswa sezvinodzivirira magetsi, ma heater bases, chamber liners, uye vacuum chuck substrates.
Magadzirirwo (akavakirwa pa99.8% Al₂O₃):
| Pfuma | Kukosha |
| Zvinhu | 99.8% Alumina (Nyanga dzenzou) |
| Kuwanda kwevanhu | 3.93 g/cm³ |
| Simba reKuchinjika | 361 MPa |
| Simba reDielectric | 15×10⁶ V/m |
| Kuramba Kwakananga | >10¹⁴ Ω·mm²/m |
| Kufambisa kwekupisa | 32 W/m·k |
| Kuwedzera kwekupisa (25-1000°C) | 7.2×10⁻⁶/℃ |
| Tembiricha Yekushanda Yakanyanya | 1600°C |
| Kufara (pa 100 mm) | ≤5 μm |
| Kushivirira kwehukobvu | ± 0.05 mm |
| Kuoma Kwepamusoro | Ra ≤0.4 μm |
Mashandisirwo:
- · Mapureti ekudzivirira magetsi ari mumidziyo ine simba guru
- · Maplate ekutsigira hita mumaovheni ekupararira
- · Machira emukamuri eCVD/PVD
- · Maplate epasi ekushandisa vacuum chucks
Zvakanakira:
- · 0% yekunwa mvura - hapana kuburitsa mweya mu vacuum
- · Haina makemikari - inodzivirira maasidhi nema halogen (kunze kweHF)
Kugadzirisa:
Maburi, kucheka, kutenderedza mativi, uye simbi zviripo.
