Zvikamu zveESD-Safe Alumina Ceramic zveStatic-Sensitive Wafer Handling
Zvikamu zveSt.Cera's ESD (electrostatic discharge) safe alumina ceramic zvinogadzirwa kubva ku99.8% high-purity Al₂O₃ ine resistivity yakagadzirwa yepamusoro ye10⁶–10⁹ Ω/sq, inowanikwa kuburikidza nekushandisa doping kana coating process. Zvikamu izvi zvinobvisa simba re static, zvichidzivirira kukuvara kwe electrostatic kune sensitive semiconductor wafers nemidziyo. Chinhu chepasi chinochengetedza simba rayo re flexural (361 MPa), kuomarara (16 GPa), uye dielectric strength (15×10⁶ V/m). Zvikamu zve ceramic zvakachengeteka zveESD zvinosanganisira end effectors, lift pins, guide rails, uye custom fixtures yeFAB automation.
Magadzirirwo(zvichibva pa99.8% Al₂O₃ nekurapwa kweESD):
| Pfuma | Kukosha |
| Zvinhu zvepakutanga | 99.8% Alumina |
| Kudzivirira Kumusoro (ESD) | 10⁶–10⁹Ω/sq |
| Kuwanda kwevanhu | 3.93 g/cm³ |
| Simba reKuchinjika | 361 MPa |
| Kuomarara kwaVickers | 16 GPa |
| Modulus yeYoung | 380 GPa |
| Kuwedzera kwekupisa (25-1000°C) | 7.2×10⁻⁶/℃ |
| Tembiricha Yekushanda Yakanyanya | 800°C |
| Simba reDielectric (rakawanda) | 15×10⁶ V/m |
Cherechedza: Kudzivirira kweESD pamusoro pevhu hakupihwe mumatafura ezvigadzirwa zvezvinhu zvakapihwa. Rudzi rwuri pamusoro apa ndirwo rwakajairika muindasitiri yezvigadzirwa zveceramics zvinoparadza. Ndapota taura nesu kuti muwane mishumo yekuyedza.
Mashandisirwo:
● Zvishandiso zvekupedzisira zvakachengeteka zveESD zvekufambisa wafer
● Mapini ekudzika pasi uye zvinhu zveESD mumidziyo yeFAB
● Edza masoketi emidziyo isingachinji
● Maturusi ekuchenesa uko kudzora kwenzvimbo kwakakosha
Kugadzira & Hunhu:
Kugadziriswa kwealumina kwakajairika + kurapwa kweESD pamusoro pemvura → kusimba kwemvura kunoyerwa zvichienderana neANSI/ESD STM11.11. Chikamu chimwe nechimwe chinoedzwa zvizere ne electrode ye concentric ring.
Zvakanakira:
● Inodzivirira kurasikirwa kwegoho rine chekuita neESD
● Inodzivirira simba remuchina weceramic uye inodzivirira makemikari
● Hapana chibereko chezvimedu kubva pakubuda kwesimba
