Mhete yeSeal Alumina Ceramic Yakachena Kwazvo Yekuisirwa Kwemukamuri Yekupisa Kwakakwirira
Mhete yeSt.Cera's ceramic seal yakagadzirwa senzira yekuchinja maO-rings epolymer munzvimbo dzakanyanya uko elastomers dzinoora. Yakagadzirwa kubva ku99.8% high-purity alumina (Al₂O₃), iyi mhete yakasimba inoshandiswa mukushandiswa kwe static sealing - inowanzo batanidzwa ne soft metal kana graphite gasket - kupa vacuum yakavimbika kana gasi rekudzivirira patembiricha inosvika 800°C uye munzvimbo dzine plasma kana makemikari akasimba. Chinhu ichi hachibudisi mweya, simba rekumanikidza rakawanda (simba re flexural 361 MPa), uye kusagadzikana kwemakemikari (kunodzivirira ma halogen, acids, uye alkalis kunze kweHF). Nzvimbo dzekuvhara dzakanyatsorongeka (flatness ≤5 μm, surface roughness Ra ≤0.2 μm) dzinoita kuti pave nekusangana kwakasimba kwesimbi kana ceramic components.
Magadzirirwo(zvakavakirwa pa99.8% Al₂O₃):
| Pfuma | Kukosha |
| Zvinhu | 99.8% Alumina (Nyanga dzenzou) |
| Kuwanda kwevanhu | 3.93 g/cm³ |
| Kunyudzwa kweMvura | 0% |
| Simba reKuchinjika | 361 MPa |
| Simba Rokumanikidza (rakagadziriswa) | >2000 MPa |
| Kuomarara kwaVickers | 16 GPa |
| Kuwedzera kwekupisa (25–1000°C) | 7.2×10⁻⁶/℃ |
| Kupisa Kunoshanda Kwakanyanya | 800°C (mhepo), 1600°C (kutonhora) |
| Kupedzisa kwekumusoro (kumeso kwekuvhara) | Ra ≤0.2 μm (yakamonerwa) |
| Kufara (pa 25 mm) | ≤5 μm |
| Mwero wekubuda kweHelium | <1×10⁻¹⁰ Pa·m³/s (ine gasket yakakodzera) |
Mashandisirwo:
- · Semiconductor process chamber static seals (CVD, PVD, etch)
- · Zvisimbiso zvemasuo echoto zvinopisa zvakanyanya
- · Maflange ekubvisa mvura
- · Kuvharwa kwemidziyo yemakemikari inogadzirisa zvinhu
Maitiro Ekugadzira:
Kudzvanya kweIsostatic → sintering pa1600°C → kunyatso kukwesha mativi maviri kuti zviite kuti zvivharwe zvinyatso tetepa uye zvakatsetseka → kukwesha mativi → kuchenesa ne ultrasonic. Ring yega yega inoyedzwa 100% pakudonhedza mvura pa helium leak detector ine gasket yesimbi yakajairika.
Kudzora Hunhu:
- · Kutarisa saizi yeCMM (ID, OD, ukobvu, kufanana)
- · Profilometer yepamusoro yeRa uye waviness
- · Kuyera kutsetseka uchishandisa optical flat
- · Kuyedzwa kwekubuda kweHelium (nzira yekumanikidza musana)
Zvakanakira kupfuura Polymer O-rings:
- · Inoshingirira 800°C vs. <300°C yeFFKM
- · Hapana kusvibiswa kwemhepo — hapana kusvibiswa kwenzvimbo isina mhepo
- · Inodzivirira makemikari ese eplasma (fluorine, chlorine, okisijeni)
- · Hapana seti yekumanikidzwa kana kushanduka kusingaperi
- · Hupenyu husina muganho hwebasa munzvimbo dzakachena
Zvipingamupinyi (Mashoko Akakosha):
- · Haisi O-ring— idenderedzwa receramic rakasimba rinoda gasket rakapfava (mhangura, aruminiyamu, kana graphite) kuti rivharwe.
- · Haikwanise kufambisa mafambiro anochinja-chinja kana kusawirirana kweflange hombe.
- · Mutengo wekutanga wakakwira kupfuura polymer O-rings, asi hupenyu hurefu hunoderedza mutengo wekuva muridzi.
- · Bhururuka — bata nekungwarira; dzivisa kukanganiswa kwenzvimbo kana kumanikidzwa kukotama.
Cherechedza:Ruzivo rwuri pamusoro rwunotevera tafura yeAl₂O₃ yakapihwa. Hapana ruzivo rwezvinhu zve elastomeric rwakapihwa. Chigadzirwa ichi irin'i yechisimbiso isingachinji, kwete iririn'i ye elastomeric O-ring. Ndapota simbisai kana izvi zvichizadzisa zvinodiwa zvenyu.
