Teflon Coated Ceramic End Effector - Nzvimbo Isina Kunamira Yekubata Wafer Inonzwa
St.Cera's Teflon (PTFE) coated ceramic end effector inosanganisa substrate yealumina ine simba guru ne PTFE coating yakafanana, ine low-friction (ukobvu 15–30 μm). Coating iyi inopa coefficient yakaderera kwazvo yekukweshana (≤0.1), inodzivisa makemikari zvakanaka, uye hainamati, ichidzivirira wafer adhesion uye inobvisa kusvibiswa kwemusana. Substrate yeceramic iri pasi (99.8% Al₂O₃) inopa simba rakakwirira re flexural (361–1000 MPa), inodzivisa kupera, uye inogadzikana pakupisa kusvika 260°C (muganhu we coating). Iyi end effector yakakodzera kubata wafers dzakatetepa, dzakatetepa, kana dzinonamira (semuenzaniso, mushure me photoresist coating kana chemical processes).
Magadzirirwo (zvakavakirwa pa99.8% Al₂O₃ substrate ine PTFE coating):
| Pfuma | Kukosha |
| Zvinhu zvepasi pevhu | 99.8% Alumina (Nyanga dzenzou) |
| Zvekuputira | PTFE (Teflon) |
| Kukora kwekunamira | 15–30 μm |
| Coefficient yeKukweshana (Yakafukidzwa) | ≤0.1 |
| Simba reSubstrate Flexural (Al₂O₃) | 361 MPa |
| Kuomarara kweSubstrate (Al₂O₃) | 16 GPa |
| Kuwanda kweSubstrate | 3.93 g/cm³ |
| Kupisa Kukuru Kwekushanda (muganho wekuputira) | 260°C |
| Kuomarara kwepamusoro (pamberi pekuputira) | Ra ≤0.4 μm |
| Simba reDielectric (substrate) | 15×10⁶ V/m |
Cherechedza: Kuputira kwePTFE kunoganhurira tembiricha yepamusoro kusvika 260°C; kana paine tembiricha yepamusoro, funga nezvekushandisa ceramic isina kuputirwa kana zvimwe zvipfeko.
Mashandisirwo:
- · Kubata mawafer mushure mekunamira ne photoresist coating (nzvimbo dzinonamira)
- · Kutamiswa kwemawafer matete kana asina kusimba (kunodzivirira kunamira)
- · Zvishandiso zvekuongorora semiconductor uye metrology
- · Kuzvigadzira otomatiki mukamuri rekugezesa uko kusvibiswa kwezvikamu kunofanira kuderedzwa
Maitiro Ekugadzira:
Ceramic substrate yakanyungudutswa uye yakanyatsogadzirwa → roughening pamusoro (plasma etch kana grit blast) → PTFE spray coating → heat curating pa380°C → chekupedzisira chekuongorora. End effector yega yega inoongororwa kuti ine ukobvu hwe coating (eddy current), adhesion (cross-cut test ASTM D3359), uye coefficient of friction.
Kudzora Hunhu:
Kuongororwa kwe100% kwezvibodzwa zvepinhole kana mabubbles; kufanana kweukobvu hwekuvhara mukati me ±5 μm; hapana kucheka mushure mekuyedzwa kwe90° kukotama pacoupon yeuchapupu. Kuongororwa kwedimensional kusvika pakushivirira kweOEM (hurefu ±0.05 mm, kupfava ≤0.1 mm).
Zvakanakira pane Zvisina Kuputirwa kana Zvimwe Zvipfeko:
- · Nzvimbo isina kunamira inodzivirira kunamira kwewafer uye kutyoka
- · Kukwikwidzana kwakaderera pakati pemachira eceramic
- · Inodzivirira makemikari zvakanyanya (asidhi, mabhesi, zvinonyungudutsa)
- · Inoderedza kugadzirwa kwezvikamu nekudzivirira kutamiswa kwezvinhu
Miganhu (mashoko pamusoro pekutsauka kwezvinhu):
Kuputira kwePTFE hakubvi pamatafura ezvigadzirwa zvematurusi akapihwa (Al₂O₃, ZrO₂, Si₃N₄, BeO). Zvimiro zve substrate zvinotevedzera zvakadzama datasheet rakapihwa (99.8% Al₂O₃). Zvimiro zvekuputira zvakavakirwa pazvimiro zvePTFE zveindasitiri, sezvo pasina data rekuputira rakapihwa. Kune mashandisirwo anopfuura 260°C, chinhu chekupedzisira checeramic chisina kuputirwa chinokurudzirwa.*
Kugadzirisa:
Inowanikwa muhurefu hwe150–1500 mm, maumbirwo emucheto (edge grip, Bernoulli, flat), mapatani eflange ekumisikidza pamufananidzo weOEM. Kuvhara zvishoma (nzvimbo dzinobata chete) kana kufukidza kwakazara hazvidiwi.
Kumbira sampuro yekunamira uye kuyedzwa kwekukweshana.
