Alumina-Based Standard Vacuum Chuck – Yakasimba pakugadzira michina nemazvo
Iyi chuck ye vacuum yakagadzirwa nealumina yakagadzirwa ne99.8% Al₂O₃, ichipa nzvimbo yakatsetseka isina maburi ine mapatani e vacuum groove akagadzirwa. Inopa kuomarara kwakanyanya (Young's modulus 380 GPa) uye flatness (≤3 μm), zvichiita kuti ive yakakodzera kukuya, kukwesha, uye kuchekerera ma wafers e semiconductor nema optical components. Kupisa kwakanyanya kwechinhu ichi (32 W/m·k) kunoita kuti tembiricha ifanane panguva yekugadzirisa.
Magadzirirwo(zvakavakirwa pa99.8% Al₂O₃):
| Pfuma | Kukosha |
| Zvinhu | 99.8% Alumina (Nyanga dzenzou) |
| Kuwanda kwevanhu | 3.93 g/cm³ |
| Simba reKuchinjika | 361 MPa |
| Kuomarara kwaVickers | 16 GPa |
| Modulus yeYoung | 380 GPa |
| Kufambisa kwekupisa | 32 W/m·k |
| Kufara | ≤3 μm (inopfuura 200mm) |
| Kuoma kwepamusoro (kurutivi rwechuck) | Ra ≤0.4 μm |
| Tembiricha Yekushanda Yakanyanya | 800°C |
Mashandisirwo:
- · Kukuya chigubhu chekumashure (chakakora uye chakatsetseka)
- · Kucheka zvinhu zvisina kusimba nemazvo
- · Kubatanidza zvinhu zveceramic
- · Kupukuta lenzi yemaziso
Kugadzira:
Kubatanidza mativi ese nemazvo → kukwesha dhaimani (sarudzo) → kutenderedza mativi → kuchenesa ne ultrasonic → kuongorora 100% flatness uchishandisa laser interferometer.
Azvakanakira:
- · Rutsigiro rwakasimba runoderedza kutsauka pasi pemutoro
- · Hapana kugadzira tunhu tunobva muchimiro chine maburi
- · Zviri nyore kuchenesa (zvinoenderana nekupukuta zvinonyungudutsa)
- · Migero yeVacuum inogona kugadziriswa (concentric, radial, mapatani akagadzirwa)
Saizi Dziripo:
Rakatenderera: 100mm, 150mm, 200mm, 300mm; sikweya/rectangular kana wakumbira.
Tinopawo shanduro dzakavakirwa pasimbi kuti dzive nesimba repamusoro remakanika.
