Porous Ceramic Vacuum Chuck yeWarped Wafer Handling
Chigadziko cheSt.Cera chine maburi chakagadzirwa nealumina ine maburi akaenzana e30–45% uye maburi ane maburi anokura kubva pa10 kusvika 100 μm. Kusiyana nemaburi ekare ane maburi, pamusoro pemaburi pane maburi pane wafer yese, zvichibata zvakanaka mawafer akakombama, akatetepa, kana asina kuputsika. Chigadziko ichi chine maburi chinodzivirirawo maburi ekumashure.
Magadzirirwo(zvakavakirwa pa99.6% Al₂O₃):
| Pfuma | Kukosha |
| Kuboorwa kwemvura | 30–45% |
| Saizi yepakati pemaburi | 10–100 μm (inogona kusarudzwa) |
| Simba reKuchinjika | ≥250 MPa |
| Kureba (kupfuura 300mm) | ≤5 μm |
| Kupedzisa Kwepamusoro | Yakamoneredzwa (Ra 0.8 μm) |
| Nhamba Yepamusoro Yekuvharira Mvura | -80 kPa |
| Tembiricha yekushanda | 400°C (mhepo), 600°C (isina kusimba) |
| Zvinhu | 99.6% Al₂O₃, ZrO₂, kana SiC |
Mashandisirwo:
Chingwa chakatetepa (≤50 μm) chekukuya nekumashure
Kuisa wafer yakakombama yekucheka
Kutorwa kwedii yakasanganiswa kubva patepi
Kubata magirazi egirazi
Kugadzira & Hunhu:
Upfu hweCeramic hwakasanganiswa ne organic pore formers → yakadzvanywa → yakasinwa → yakakomberedzwa kusvika pakukora kwekupedzisira. Chuck yega yega inoongororwa kuti ionekwe kuti inoenderana sei ne vacuum (≤5% deviation) uye inoongororwa kuti ionekwe kana paine pore size distribution (SEM). Kusatsetseka kunoyerwa ne laser interferometer.
Zvakanakira kupfuura Grooved Chucks:
Hapana chiratidzo chemucheto wewafer kana kuchinja kwekufa
Inobata mawafer akakombama (anosvika 500 μm bow)
Inobvisa kuvharika kwemaburi evacuum
Rutsigiro rwekuzvienzanisa rwema substrates matete
Kugadzirisa:
Maumbirwo edenderedzwa kana kuti rectangular, saizi inosvika 600 mm. Tinogona kuisa mhete dzekuvhara mumucheto kana nzvimbo dzevacuum. Mhando dzakatsigirwa nesimbi dziripo kuti dzikwanise kushandiswa zvakanyanya.
Kumbira sampuro yehukuru hwewafer yako uye bvunzo yewarpage.
