Purati Yekugovera Gasi reAlumina yeCVD/PVD Showerhead
Purati yekugovera gasi yeSt.Cera (showerhead) yakagadzirwa nemazvo kubva mu 99.8% alumina ceramic. Ine maburi madiki (diameter 0.3–1.5 mm) ayo anovimbisa kuti gasi rinoyerera zvakaenzana pamusoro pewafer panguva yeCVD, PVD, kana ALD. Simba guru re dielectric plate (>15×10⁶ V/m) uye resistance yeplasma zvinoita kuti ive yakakosha pakuiswa kwe semiconductor thin-film.
Magadzirirwo:
| Pfuma | Kukosha |
| Zvinhu | 99.8% Al₂O₃ kana SiC |
| Dhayamita | 100 - 1500mm (yakatenderera) kana kuti rectangular |
| Ukobvu | 5 - 20 mm |
| Dhayamita yegomba | 0.3 – 1.5 mm |
| Patani yeHole | Yakagadzirwa (triangular, sikweya, radial) |
| Kufara | ≤10 μm pamusoro penzvimbo yakazara |
| Kuoma Kwepamusoro | Ra ≤0.6 μm (rutivi rwegesi) |
| Chiyero cheNzvimbo Yakavhurika | 5–15% |
Mashandisirwo:
Maplate ePECVD ekugeza
Majekiseni egasi reALD
Mapureti ekugovera gasi mukamuri reEtch
Zvikamu zveMOCVD reactor
Kugadzira:
Alumina substrate yakatsetseka → Kuboorera kweCNC nemidziyo yakaputirwa nedhaimani (kushivirira nzvimbo yegomba ±0.02 mm) → kubvisa maburi → kuchenesa kweultrasonic → Kurongedza kweKirasi 100.
Kudzora Hunhu:
Pureti yega yega inoongororwa zvizere kuti ione saizi yeburi (system yekuona), kuti rakatsetseka sei (laser interferometer), uye kuti gasi rinoyerera zvakaenzana sei (pressure mapping). Hapana maburi madiki pasi pemaikorosikopu makumi maviri.
Zvakanakira kupfuura Mapurati eSimbi:
Hapana kusvibiswa kwesimbi mumafirimu matete
Kugadzirwa kwezvikamu zvishoma (hapana ngura)
Inotsungirira plasma dzinochenesa zvine hukasha (CF₄, NF₃)
Zvimiro Zvakagadzirwa Nemunhu:
Nzira dzegasi dziri kumashure, maburi ane maburi anoboorwa, zvisimbiso zvemupendero, uye mhando dzakasiyana dzezvinhu (SiC yekupisa kwakanyanya, Y₂O₃ coating yekudzivirira plasma).
Isu tinopa ongororo yeCAD uye simulation yekuyerera kwemvura tisati tagadzira.
