Pini Inotsigira Ceramic yeSemiconductor Process Fixtures
Mapini ekutsigira eSt.Cera's ceramic (anozivikanwawo semapini ekusimudza kana mapini ekutsigira) anoshandiswa mumakamuri ekugadzirisa e semiconductor kukwidziridza mawafer kana substrates panguva yekubata, kupisa, kana kutonhodza. Akagadzirwa kubva ku99.8% alumina kana silicon nitride, mapini aya anopa simba rekudzvanya, kugadzikana kwekupisa, uye kuramba makemikari. Dhizaini ye hemispherical kana flat tip inodzivirira wafer kukwenya.
Magadzirirwo(Alumina 99.8%):
| Pfuma | Kukosha |
| Zvinhu | 99.8% Al₂O₃ kana Si₃N₄ |
| Kureba | 10 - 100 mm |
| Dhayamita | 1 – 10 mm |
| Chimiro chemuromo | Yakati sandara, ine mativi ose, yakanongedza |
| Simba Rokumanikidza (Al₂O₃) | >2000 MPa |
| Tembiricha Yepamusoro Yekushanda (Al₂O₃) | 1600°C |
| Kupedzisa Kwepamusoro | Yakamoneredzwa (Ra ≤0.4 μm) |
| Kushivirira padhayamita | ± 0.01 mm |
Mashandisirwo:
Pini dzekusimudzira mumakamuri eCVD/PVD
Mapini ekutsigira ekubika hotplate
Zvimiro zvekutsigira makadhi ekuongorora
Chikepe cheQuartz chinotsigira
Kugadzira:
Kukuya kweOD pasina pakati chaipo → kukuya kwedhaimani kweprofile yetip → kucheneswa ne ultrasonic → kuongororwa kwe100% dimensional.
Kudzora Hunhu:
CMM yehurefu/dhayamita, optical comparator yetip radius, load testing yekusimbisa compressive strength (random sample per lot). Hapana kusvibiswa kweferromagnetic (yakasimbiswa nemagnet).
Zvakanakira kupfuura Metal kana Quartz Pins:
Nguva yehupenyu yakareba ka5 kupfuura simbi isina ngura
Hapana kusvibiswa kwesimbi mukamuri rekugadzirisa
Kugona kupisa kwakanyanya kupfuura quartz (1600°C vs 1100°C)
Nzvimbo isinganamati (kunamatira kwezvikamu zvishoma)
Kugadzirisa:
Mapurofayiri akawanda emuromo, hwaro hwakarukwa, kana mubato wakatetepa.
Tinopawo mapini eSiC kune nharaunda dzakanyanya dzeplasma.
