-
Zvikamu zveCeramic Ring Alumina High-Precision Ceramic
Zvigadzirwa nekupisa kunotonhora uye kunopiswa nekupisa kwakanyanya, zvobva zvagadzirwa nemachina chaiwo uye zvakapetwa, zvikamu zveceramic zvinogona kusangana nechero zvinodiwa zvemidziyo yesemiconductor ine hunhu hwayo hwekudzivirira kupera, kuramba ngura, kuwedzera kupisa kushoma, uye kuputira. Ceramics inogona kushanda mumhando dzakasiyana dzemidziyo yekugadzira semiconductor ine mamiriro ekupisa kwakanyanya, vacuum kana corrosive gas kwenguva yakareba.
Yakagadzirwa nehupfu hwealumina hwakachena kwazvo, hwakagadziriswa nekudzvanywa kwe isostatic inotonhora, kupisa kwakanyanya uye kupedzisa nemazvo, inogona kusvika pakukwanisa kwayo kusvika ±0.001 mm, kupedzisa pamusoro peRa 0.1, kuramba kupisa kusvika 1600℃.
-
ST.CERA Zvishandiso zveSemiconductor zvakagadzirwa neCeramic Chucks
Zvigadzirwa nekupisa kunotonhora uye kunopiswa nekupisa kwakanyanya, zvobva zvagadzirwa nemachina chaiwo uye zvakapetwa, zvikamu zveceramic zvinogona kusangana nechero zvinodiwa zvemidziyo yesemiconductor ine hunhu hwayo hwekudzivirira kupera, kuramba ngura, kuwedzera kupisa kushoma, uye kuputira. Ceramics inogona kushanda mumhando dzakasiyana dzemidziyo yekugadzira semiconductor ine mamiriro ekupisa kwakanyanya, vacuum kana corrosive gas kwenguva yakareba.
Yakagadzirwa nehupfu hwealumina hwakachena kwazvo, hwakagadziriswa nekudzvanywa kwe isostatic inotonhora, kupisa kwakanyanya uye kupedzisa nemazvo, inogona kusvika pakukwanisa kwayo kusvika ±0.001 mm, kupedzisa pamusoro peRa 0.1, kuramba kupisa kusvika 1600℃.
-
Silicon Carbide (SiC) Ceramic End Effector - Kusimba Kwakanyanya Kwekubata Wafer Pakupisa Kwakakwirira
St.Cera's SiC ceramic end effector inogadzirwa kubva kusilicon carbide ine purity yakakwira (SiC content 99.72%, free Si 0.05%) ichishandisa S1111 batch material. Inopa hunhu hwakanaka hwemakanika: flexural strength 449 MPa (yakayerwa), elastic modulus 457 GPa (yakayerwa), uye Vickers hardness 25–28 GPa (yakayerwa). Density yakaderera (3.10–3.15 g/cm³, yakayerwa) inopa kuomarara kwakanyanya, kwakanakira marobhoti ekufambisa wafer ane kumhanya kukuru. Nekupisa kwe120–150 W/m·K (yakayerwa) uye thermal expansion coefficient ye4.0–4.5×10⁻⁶/℃ (yakayerwa), end effector iyi inobvisa kupisa zvinobudirira uye inochengetedza kugadzikana kwedimensional panguva yekubata tembiricha yepamusoro (kusvika 1600–1700°C, hapana mutoro). Ruvara rutema/grey uye zero absorption yemvura zvinoita kuti cleanroom ienderane.
-
Silicon Carbide (SiC) Yakavakirwa paVacuum Chuck yeNzvimbo Dzinopisa Nekupisa Kwakanyanya & Plasma
St.Cera's SiC-based ceramic chuck inogadzirwa kubva kusilicon carbide ine purity yakakwira (batch S1111, SiC 99.72%, free Si 0.05%). Inopa simba reflexural rakayerwa re449 MPa, kusimba kwe fracture kwe3.12 MPa·m¹/², uye elastic modulus ye457 GPa. Kupisa kwakajairika kwechinhu ichi (120–150 W/m·K) uye kuwedzera kwekupisa kwakaderera (4.0–4.5×10⁻⁶/℃) zvinogonesa kukurumidza kupisa uye wafer warpage shoma panguva yekupisa. Chuck inogona kugadzirwa sechuck ine porous vacuum (kuyerera kwegesi kwakaenzana) kana chuck yakagadzika. Nekupisa kwakanyanya kwekushandiswa kwe1600–1700°C (isina mutoro) uye kuramba kukuru kweplasma erosion, chuck iyi yakakodzera kugadzirisa wafer yekupisa kwakakwira (annealing, RTP) uye aggressive etch chambers uko alumina chucks inoora.
-
Zvishandiso zveSemiconductor Ceramic Spare Parts Ceramic Carriers
Zvigadzirwa nekupisa kunotonhora uye kunopiswa nekupisa kwakanyanya, zvobva zvagadzirwa nemachina chaiwo uye zvakapetwa, zvikamu zveceramic zvinogona kusangana nechero zvinodiwa zvemidziyo yesemiconductor ine hunhu hwayo hwekudzivirira kupera, kuramba ngura, kuwedzera kupisa kushoma, uye kuputira. Ceramics inogona kushanda mumhando dzakasiyana dzemidziyo yekugadzira semiconductor ine mamiriro ekupisa kwakanyanya, vacuum kana corrosive gas kwenguva yakareba.
Yakagadzirwa nehupfu hwealumina hwakachena kwazvo, hwakagadziriswa nekudzvanywa kwe isostatic inotonhora, kupisa kwakanyanya uye kupedzisa nemazvo, inogona kusvika pakukwanisa kwayo kusvika ±0.001 mm, kupedzisa pamusoro peRa 0.1, kuramba kupisa kusvika 1600℃.
-
Mhete yeAlumina Ceramic Inosungirirwa neSimbi Yekushandisa Zvishandiso Zvakasimba zveKurovera
Mhete yekukuya yeSt.Cera ine simbi inosanganisa alumina (99.8% Al₂O₃) yakacheneswa nesimbi ine simbi yakagadzirwa nemazvo (inowanzova aruminiyamu kana simbi isina ngura). Dhizaini iyi yehybrid inopa simba rekusakara uye kusagadzikana kwemakemikari kweceramic pamusoro pekukuya, nepo simbi ichiwedzera simba remuchina, nyore kuisa, uye kuramba kuputsika. Rutivi rwealumina runopa simba rekuchinjika re361 MPa, kuomarara kweVickers kwe16 GPa, uye kugadzikana kwekupisa kusvika ku800°C. Rutivi rwesimbi rwakagadzirwa nemaburi ekukwirisa, mapini ekutsvaga, kana hunhu hwemagineti hwekubatanidza mumichina yekukwiza, magrinder epuraneti, uye michina yeCMP.
-
Zvikamu zveCeramic zveSemiconductor Probe Station Equipment
Zvigadzirwa nekupisa kunotonhora uye kunopiswa nekupisa kwakanyanya, zvobva zvagadzirwa nemachina chaiwo uye zvakapetwa, zvikamu zveceramic zvinogona kusangana nechero zvinodiwa zvemidziyo yesemiconductor ine hunhu hwayo hwekudzivirira kupera, kuramba ngura, kuwedzera kupisa kushoma, uye kuputira. Ceramics inogona kushanda mumhando dzakasiyana dzemidziyo yekugadzira semiconductor ine mamiriro ekupisa kwakanyanya, vacuum kana corrosive gas kwenguva yakareba.
Yakagadzirwa nehupfu hwealumina hwakachena kwazvo, hwakagadziriswa nekudzvanywa kwe isostatic inotonhora, kupisa kwakanyanya uye kupedzisa nemazvo, inogona kusvika pakukwanisa kwayo kusvika ±0.001 mm, kupedzisa pamusoro peRa 0.1, kuramba kupisa kusvika 1600℃.
-
Kugadziriswa Kwakagadzirwa kweAl2O3 Ceramic Wafer Chuck
Zvigadzirwa nekupisa kunotonhora uye kunopiswa nekupisa kwakanyanya, zvobva zvagadzirwa nemachina chaiwo uye zvakapetwa, zvikamu zveceramic zvinogona kusangana nechero zvinodiwa zvemidziyo yesemiconductor ine hunhu hwayo hwekudzivirira kupera, kuramba ngura, kuwedzera kupisa kushoma, uye kuputira. Ceramics inogona kushanda mumhando dzakasiyana dzemidziyo yekugadzira semiconductor ine mamiriro ekupisa kwakanyanya, vacuum kana corrosive gas kwenguva yakareba.
Yakagadzirwa nehupfu hwealumina hwakachena kwazvo, hwakagadziriswa nekudzvanywa kwe isostatic inotonhora, kupisa kwakanyanya uye kupedzisa nemazvo, inogona kusvika pakukwanisa kwayo kusvika ±0.001 mm, kupedzisa pamusoro peRa 0.1, kuramba kupisa kusvika 1600℃.
-
ST.CERA Yakagadzirirwa Semiconductor Equipment Ceramic Plate
Zvigadzirwa nekupisa kunotonhora uye kunopiswa nekupisa kwakanyanya, zvobva zvagadzirwa nemachina chaiwo uye zvakapetwa, zvikamu zveceramic zvinogona kusangana nechero zvinodiwa zvemidziyo yesemiconductor ine hunhu hwayo hwekudzivirira kupera, kuramba ngura, kuwedzera kupisa kushoma, uye kuputira. Ceramics inogona kushanda mumhando dzakasiyana dzemidziyo yekugadzira semiconductor ine mamiriro ekupisa kwakanyanya, vacuum kana corrosive gas kwenguva yakareba.
Yakagadzirwa nehupfu hwealumina hwakachena kwazvo, hwakagadziriswa nekudzvanywa kwe isostatic inotonhora, kupisa kwakanyanya uye kupedzisa nemazvo, inogona kusvika pakukwanisa kwayo kusvika ±0.001 mm, kupedzisa pamusoro peRa 0.1, kuramba kupisa kusvika 1600℃.
-
12-Inch Alumina Vacuum Chuck ye300mm Wafer Processing
Chigadziko chevacuum cleaner cheSt.Cera chine 12-inch chakagadzirwa nemazvo kubva pa99.8% high-purity alumina (Al₂O₃) kuti chishandiswe pakubata wafer ye300mm. Chigadziko chine nzvimbo yakatsetseka (groove width 0.5–1.0 mm, pitch 2–3 mm) kuti chive nechokwadi chekuti vacuum cleaner inopararira zvakaenzana mu300mm dhayamita yese. Kusatsetseka kunochengetwa mukati me5 μm, zvichiita kuti wafer isapinda panguva yekucheka, kukuya, uye kuongorora. Simba guru rekutenderera (361 MPa) uye kuomarara (16 GPa) zvinovimbisa kugadzikana kwenguva refu kunyangwe pasi pevacuum cycles dzinodzokororwa.
-
Alumina Ceramic End Effector ine Integrated Vacuum Channels
St.Cera's alumina vacuum end effector inobatanidza nzira dzevacuum dzakagadzirwa nemachina nemaburi ekusveta zvakananga mumuviri wealumina we99.8% wakachena zvakanyanya. Dhizaini iyi inobvisa mapedhi ekunze evacuum, zvichiita kuti wafer ikwanise kutorwa zvakananga nesimba rakafanana rekubata. Simba guru re flexural rechinhu ichi (361 MPa) uye kuomarara (16 GPa) zvinovimbisa kugadzikana kwenguva refu pasi pevacuum cycles dzinodzokororwa. Kusatsetseka munzvimbo yepad kunochengetwa mukati me10 μm, zvichidzivirira wafer kushushikana uye kutyoka. Mapaipi evacuum ari paflange yekumashure kuti zvive nyore kubatanidza nemaoko erobhoti eOEM.
-
Zvikamu zveESD-Safe Alumina Ceramic zveStatic-Sensitive Wafer Handling
Zvikamu zveSt.Cera's ESD (electrostatic discharge) safe alumina ceramic zvinogadzirwa kubva ku99.8% high-purity Al₂O₃ ine resistivity yakagadzirwa yepamusoro ye10⁶–10⁹ Ω/sq, inowanikwa kuburikidza nekushandisa doping kana coating process. Zvikamu izvi zvinobvisa simba re static, zvichidzivirira kukuvara kwe electrostatic kune sensitive semiconductor wafers nemidziyo. Chinhu chepasi chinochengetedza simba rayo re flexural (361 MPa), kuomarara (16 GPa), uye dielectric strength (15×10⁶ V/m). Zvikamu zve ceramic zvakachengeteka zveESD zvinosanganisira end effectors, lift pins, guide rails, uye custom fixtures yeFAB automation.
