Silicon Carbide (SiC) Ceramic End Effector - Kusimba Kwakanyanya Kwekubata Wafer Pakupisa Kwakakwirira
St.Cera's SiC ceramic end effector inogadzirwa kubva kusilicon carbide ine purity yakakwira (SiC content 99.72%, free Si 0.05%) ichishandisa S1111 batch material. Inopa hunhu hwakanaka hwemakanika: flexural strength 449 MPa (yakayerwa), elastic modulus 457 GPa (yakayerwa), uye Vickers hardness 25–28 GPa (yakayerwa). Density yakaderera (3.10–3.15 g/cm³, yakayerwa) inopa kuomarara kwakanyanya, kwakanakira marobhoti ekufambisa wafer ane kumhanya kukuru. Nekupisa kwe120–150 W/m·K (yakayerwa) uye thermal expansion coefficient ye4.0–4.5×10⁻⁶/℃ (yakayerwa), end effector iyi inobvisa kupisa zvinobudirira uye inochengetedza kugadzikana kwedimensional panguva yekubata tembiricha yepamusoro (kusvika 1600–1700°C, hapana mutoro). Ruvara rutema/grey uye zero absorption yemvura zvinoita kuti cleanroom ienderane.
Magadzirirwo(zvichibva pamushumo wekuyedza weSiC S1111 wakapihwa uye kukosha kwakajairika):
| Pfuma | Kukosha |
| Zvinhu | SiC (99.72% SiC, 0.05% Si Yemahara) |
| Ruvara | Dema/Gireyi |
| Kuwanda kwevanhu | 3.10–3.15 g/cm³ |
| Kunyudzwa kweMvura | 0% |
| Simba reKuchinjika | 449 MPa (avhareji) |
| Kusimba Kwekutyoka | 3.12 MPa·m¹/² (avhareji) |
| Modulus yeElastic | 457 GPa |
| Kuomarara kwaVickers | 25–28 GPa |
| Kufambisa kwekupisa (25°C) | 120–150 W/m·K |
| CTE (25–1000°C) | 4.0–4.5×10⁻⁶/℃ |
| Kupisa Kwekushandisa Kwakanyanya (hapana mutoro) | 1600–1700°C |
Mashandisirwo:
● Kubata wafer inodziya zvakanyanya (post-anneal, RTP, epitaxy)
● Makamuri ePlasma ekucheka anoda kudzivirira kukurwa kwevhu zvakanyanya
● Marobhoti ekufambisa anomhanya zvakanyanya (akareruka, akaomarara zvakanyanya)
Kugadzira:
Kucheneswa kweupfu hweSiC → Kukwesha kweCNC kwakanyatsogadzirwa kwechimiro cheruoko uye zvinhu zvekuisa → Kukwesha pamusoro pechinhu → Kuchenesa ne ultrasonic. Kuongorora kwe100% dimensional uye bvunzo yekudonha kwehelium yekushandiswa kwe vacuum.
Kudzora Hunhu:
● Kuongororwa kweCMM kwehurefu, upamhi, uye kuti hwakatsetseka
● Kuedza simba rekuchinjika pachikamu chimwe nechimwe (pachiyero chemushumo webvunzo)
● Kuongorora nemaziso pasi pemaikorosikopu kuti uone kana paine zvikanganiso pamusoro
Mabhenefiti pane Alumina kana Simbi:
● 2 × modulus yakakwira ye elastic (457 vs ~380 GPa ye alumina) - kutsauka kushoma
● 3 × kupisa kwakanyanya - kupisa kunokurumidza kupera
● Inotsungirira >1600°C zvichienzaniswa nealumina's 800°C mumhepo
● Kurema kwakaderera pane simbi - 40% kuderedza uremu
Kugadzirisa:
Kureba 150–450 mm, maumbirwo emucheto (edge grip, Bernoulli, flat), mapatani eflange ekumisikidza pamufananidzo weOEM.
*Ruzivo rwese rwemakanika rwuri pamusoro rwunobva mumushumo wekuyedza wakapihwa (batch S1111). Hunhu hwekupisa nehukuoma hwakajairika kune iyi SiC grade; ndapota taura nesu kuti uwane chitupa chakasiyana nechikamu.*
