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Ruoko rweRobhoti reAlumina Ceramic Rakacheneswa Kwazvo reKubata Wafer
Ruoko rwerobhoti rweSt.Cera rwealumina ceramic rwakagadzirwa nemazvo kubva pa99.8% Al₂O₃ (alumina) yakacheneswa zvakanyanya. Runosanganisa simba reflexural rakasiyana (361 MPa), kuomarara kwakanyanya (16 GPa), uye density yakaderera (3.93 g/cm³), zvichikonzera ruoko rwakareruka asi rwakasimba rwekutamisa wafer ye semiconductor. Kupisa kwekuwedzera kwechinhu (7.2×10⁻⁶/°C) kunoenderana nesilicon zvakanyanya, zvichideredza kusawirirana kwekupisa panguva yekugadzirisa.
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Bernoulli Ceramic End Effector — Kubata Wafer Isina Kubata MaWafer Akatetepa Uye Asina Kusimba
St.Cera's Bernoulli ceramic end effector inoshandisa aerodynamic lift kubata mawafers pasina kubata muviri. Yakagadzirwa kubva ku99.8% alumina (Al₂O₃) kana silicon carbide (SiC), ine ma nozzles akagadzirwa nemazvo anoburitsa gasi rakamanikidzwa kuti rigadzire firimu remhepo rakatetepa pakati pe effector newafer. Iyi nheyo yekusabata inobvisa kusvibiswa kwemashure, kupwanyika kwemucheto, uye kukuvara kwenzvimbo, zvichiita kuti ive yakakodzera mawafers matete (≤100 μm), asina kusimba, kana akakombama. Iyo ceramic substrate inopa simba rakasimba reflexural (361 MPa yeAl₂O₃; kusvika 550–600 MPa yeSiC), huremu hwakaderera, uye kugadzikana kwakanaka, zvichiita kuti ive nechokwadi chekuti inogona kudzokororwa munzvimbo dzinoshandiswa mawafers ekumhanya kwepamusoro.
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Teflon Coated Ceramic End Effector - Nzvimbo Isina Kunamira Yekubata Wafer Inonzwa
St.Cera's Teflon (PTFE) coated ceramic end effector inosanganisa substrate yealumina ine simba guru ne PTFE coating yakafanana, ine low-friction (ukobvu 15–30 μm). Coating iyi inopa coefficient yakaderera kwazvo yekukweshana (≤0.1), inodzivisa makemikari zvakanaka, uye hainamati, ichidzivirira wafer adhesion uye inobvisa kusvibiswa kwemusana. Substrate yeceramic iri pasi (99.8% Al₂O₃) inopa simba rakakwirira re flexural (361–1000 MPa), inodzivisa kupera, uye inogadzikana pakupisa kusvika 260°C (muganhu we coating). Iyi end effector yakakodzera kubata wafers dzakatetepa, dzakatetepa, kana dzinonamira (semuenzaniso, mushure me photoresist coating kana chemical processes).
