Bernoulli Ceramic End Effector — Kubata Wafer Isina Kubata MaWafer Akatetepa Uye Asina Kusimba

St.Cera's Bernoulli ceramic end effector inoshandisa aerodynamic lift kubata mawafers pasina kubata muviri. Yakagadzirwa kubva ku99.8% alumina (Al₂O₃) kana silicon carbide (SiC), ine ma nozzles akagadzirwa nemazvo anoburitsa gasi rakamanikidzwa kuti rigadzire firimu remhepo rakatetepa pakati pe effector newafer. Iyi nheyo yekusabata inobvisa kusvibiswa kwemashure, kupwanyika kwemucheto, uye kukuvara kwenzvimbo, zvichiita kuti ive yakakodzera mawafers matete (≤100 μm), asina kusimba, kana akakombama. Iyo ceramic substrate inopa simba rakasimba reflexural (361 MPa yeAl₂O₃; kusvika 550–600 MPa yeSiC), huremu hwakaderera, uye kugadzikana kwakanaka, zvichiita kuti ive nechokwadi chekuti inogona kudzokororwa munzvimbo dzinoshandiswa mawafers ekumhanya kwepamusoro.

Cherechedzai paZvishandiso:Alumina (Al₂O₃) ndiyo inonyanya kushandiswa pakugadzira ceramic end effectors mu semiconductor wafer nekuda kwekusanganiswa kwayo kwakanaka kwekuomarara, insulation yemagetsi, kugadzikana kwemakemikari, uye kushanda zvakanaka kwemari. Silicon carbide (SiC) inopa conductivity yepamusoro yekupisa, kuomarara kwakanyanya, uye kuramba kupfeka kuri nani kune mashandisirwo anonyanya kuomarara. Kunyange zvazvo yttria-stabilized zirconia (ZrO₂) ichipa kusimba kwakanyanya kwekutyoka patembiricha yemumba, hainyanyo shandiswa mukushandiswa uku nekuda kwekuwanda kwayo uye hunhu hwakasiyana hwekuwedzera kwekupisa; inogona kutariswa kune mamiriro chaiwo apo kusimba kwakanyanya kwekutyoka kunodiwa. Ndokumbirawo mubvunze timu yedu yehunyanzvi kuti muwane gwara rekusarudza zvinhu.

Magadzirirwo(zvakavakirwa pa99.8% Al₂O₃):

Nheyo yekushanda:

Mhepo yakamanikidzwa kana nitrogen (0.2–0.6 MPa) inounzwa kuburikidza nenzira dzemukati uye inobuda kuburikidza nema nozzles chaiwo. Kufamba kwemhepo kwakakurumidza kunoita kuti pave nenzvimbo ine kumanikidzwa kwakaderera pamusoro pe end effector (Bernoulli effect), zvichigadzira simba rekusimudza rinotsigira wafer pamukana we 50–200 μm. Hapana maburi e vacuum kana ma pads anosangana ne wafer kumashure.

Mashandisirwo:

• · Kubata wafer yakatetepa (≤50 μm) mushure mekukuya musana
• · Kutakurwa kwewafer yakakombama (semuenzaniso, mushure meCVD kana annealing)
• · Kutamiswa kwe solar cell ne LED sapphire substrate
• · Kuzvigadzira otomatiki kwemukamuri rekuchenesa kunoda kuti pave nekugadzira zvinhu zvidiki zvisina chinhu
• · Kugadzirisa magirazi ekugadzira magirazi

Maitiro Ekugadzira:

Chigadziko cheCeramic chakasvibiswa neupfu hwakachena zvakanyanya → 5-axis CNC machining yegasi channels nemaburi e nozzle (dhayamita 0.3–1.0 mm, tolerance ±0.01 mm) → surface lapping kusvika Ra ≤0.4 μm → ultrasonic cleaning → helium leak test (gas channels). Hapana coating inodiwa — bepa re ceramic risina chinhu harina makemikari uye harisvibisi.

Kudzora Hunhu:

• · Kuongorora kwe100% dimensional (CMM) kwenzvimbo dzemuromo, kureba kweruoko, uye kuti muromo wacho wakamira sei
• · Kuyedzwa kwekufanana kwemhepo: kuderera kwedzvinyiriro ≤5% muma nozzles ese
• · Kuyedzwa kwekubuda kwemvura: nzira dzegasi dzakavharirwa pa0.6 MPa, hapana kuderera kwekumanikidzwa kwemhepo mumasekondi makumi matatu
• · Kuongorora maziso pasi pemaikorosikopu ye20× kuti uone kana paine maburi madiki kana kuti maburi

AMabhenefiti akaenzana neConventional Contact End Effectors:

• · Hapana kusvibiswa kwemusana wewafer — hapana kubata kwemuchina
• · Hapana kupwanyika kana kutyoka kwemawafer matete
• · Inobata mawafer akakombama (anosvika 1 mm) ane mukana wakagadzikana
• · Inobvisa jenareta ye vacuum uye kugadzirisa chuck ine maburi
• · Kuvakwa kwesimbi yesimbi hakukuvadzi kusakara kana kurwiswa nemakemikari

Kugadzirisa:

• · Inowanikwa ne200 mm, 300 mm, kana saizi dzewafer dzakagadzirwa
• · Mapatani emupombi wegesi: mhando dzemapombi akatwasuka, akakombama, kana kuti mapombi
• · Zvinhu: alumina (yakajairwa) kana silicon carbide (yekuti ikwanise kupisa zvakanyanya uye irambe ichidzivirira kupfeka)
• · Kureba kweruoko, flange yekumisikidza, uye nzvimbo yechiteshi chegesi pamufananidzo weOEM

Miganhu:

Kushandiswa kwenheyo yeBernoulli (dhizaini yenozzle, mukaha wemhepo) kuri kunze kwehukuru hwematafura ezvigadzirwa zvemidziyo akapihwa. Hunhu hwemakanika nekupisa huri pamusoro hunotevera zvakadzama mapepa edata akapihwa e99.8% Al₂O₃. Hapana kukanganiswa kwekushanda kweceramic pasi pekuyerera kwegasi kwakamanikidzwa kunotarisirwa zvichibva pane hunhu hwezvinhu izvi. Kune mawafers anonzwa kuyerera kwegasi (semuenzaniso, MEMS ane zvivakwa zvisina kusimba), dhizaini yemhepo inomanikidza uye nozzle inofanira kugadziriswa zvinoenderana.